Silicon Carbon Anode CVD Method Solution
Overview
It has realized the fully automatic process from automatic conveying of raw materials, accurate metering, atmosphere protection, high temperature deposition, rapid cooling to coating processing, mixing screening, demagnetizing grading and automatic packaging. With the high-precision metering system, strict atmosphere control, and efficient deposition and coating technology, it ensures the high purity and uniformity of products.
Strict Atmosphere Protection: In the powder
replacement bin, the inert gas N2 is used for
replacement to ensure that the chamber meets the
atmosphere protection requirements.
Efficient CVD: In the vapor deposition
furnace, silane is cracked at high temperature and
uniformly deposited on the carbon-based material to form a compact silicon carbon composite.
Precise Coating Process: In the rotary furnace, the silicon carbon composite is coated
by vapor deposition to improve conductivity, stability and prolong the battery life.
Grading Discharge: through grading equipment, good and bad products are delivered to
different canning equipment, to achieve efficient classification and packaging.
